Enhancement of characteristics of ZnO thin film surface acoustic wave device on glass substrate by introducing an alumina film interlayer

Publication year: 2012 Source: Applied Surface Science, Available online 16 February 2012 Wen-Ching Shih, Tzyy-Long Wang, Yan-Kai Pen ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on Al2O3/glass substrates. The alumina films were deposited on glass substrates by electron beam evaporation

Publication year: 2012 Source: Applied Surface Science, Available online 16 February 2012 Wen-Ching Shih, Tzyy-Long Wang, Yan-Kai Pen ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on Al2O3/glass substrates. The alumina films were deposited on glass substrates by electron beam evaporation

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Enhancement of characteristics of ZnO thin film surface acoustic wave device on glass substrate by introducing an alumina film interlayer